JPH0468524U - - Google Patents
Info
- Publication number
- JPH0468524U JPH0468524U JP11151990U JP11151990U JPH0468524U JP H0468524 U JPH0468524 U JP H0468524U JP 11151990 U JP11151990 U JP 11151990U JP 11151990 U JP11151990 U JP 11151990U JP H0468524 U JPH0468524 U JP H0468524U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- etching
- tank
- overflow
- acid solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims 3
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11151990U JPH0468524U (en]) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11151990U JPH0468524U (en]) | 1990-10-24 | 1990-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468524U true JPH0468524U (en]) | 1992-06-17 |
Family
ID=31858982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11151990U Pending JPH0468524U (en]) | 1990-10-24 | 1990-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468524U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009088227A (ja) * | 2007-09-28 | 2009-04-23 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |
-
1990
- 1990-10-24 JP JP11151990U patent/JPH0468524U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009088227A (ja) * | 2007-09-28 | 2009-04-23 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |